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Ultrasonic atomizing CVD tube furnace

Release time: 2024-07-10 03:41:12 Number of views: 126

zhutu2001 (1)

Equipment introduction:

This device is an aerosol assisted vapor deposition device-AACVD (using liquid/gas aerosol precursors to grow on the substrate) for fuel cells and ZnO transparent conductive films. This instrument consists of three main modules: micro-flow liquid high-precision transmission system, ultrasonic atomization system, 1200℃ tubular furnace. This technology is suitable for the use of non-volatile precursors, and can be widely used in the preparation of nanomaterials, electrode material coating composite and so on.

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