1. The cleaning and coating process is completed in one go, eliminating secondary contamination;

2. The top-opening structure facilitates sample observation; 3. The product adopts an automatic control system with a touch screen and digital display; 4. The equipment has a high degree of integration; 5. A stable RF power supply and uniform temperature distribution improve film quality;

Product model

NBD-PECVD1200-80TI

Electrical specifications

AC220V    4KW

Reachable Temperature

1200 ℃

Continuous temperature

1150 ℃

Heating rate achievable

≤  20 ℃/分钟

RF power supply

500W   13.56MHz

Furnace tube size

Φ80*1200mm

As shown in the figure: This is a schematic diagram of the deposition process of the device.

Control system

1. The NBD-101EP embedded operating system features a bilingual graphical interface for English and Chinese, a 7-inch true color touch screen input, an intelligent human-machine dialogue mode, real-time heating power display, and non-linear sample temperature correction; it can automatically generate experimental reports and export experimental data an unlimited number of times.

2. The experimental process is more intuitive, and the operation is more convenient; 3. It has functions such as over-temperature alarm, open-couple prompt, and leakage protection.

Temperature accuracy

+/- 1 ℃

Heating element

Mo-doped Fe-Cr-Al alloy

Sealed system

Vacuum degree: ≤10Pa (mechanical pump)

Pressure measurement and monitoring

Using a digital vacuum gauge can make the equipment’s vacuum level more intuitive and the experimental results more accurate.

Gas supply system

Adopt two-way proton flow meters to precisely control the gas flow rate, integrated with the equipment.

Net weight

360KG

Precautions for using the equipment

1. When the equipment furnace temperature is ≥300°C, do not open the furnace to avoid injury;

2. During equipment use, the pressure inside the furnace tube must not exceed 0.125MPa (absolute pressure) to prevent excessive pressure from damaging the equipment; 3. When using under vacuum conditions, the operating temperature of the equipment must not exceed 800°C. 4. The internal gas pressure in the gas supply steel cylinder is relatively high. When introducing gas into the furnace tube, a pressure reducing valve must be installed on the cylinder. It is recommended to purchase a small pressure reducing valve for experimental use, with a range of 0.01MPa-0.15MPa, which will be more precise and safe during use. 5. When the furnace body temperature exceeds 1000°C, the furnace tube must not be in a vacuum state; the pressure inside the furnace tube should be equivalent to atmospheric pressure, maintaining a normal pressure state; 6. The long-term operating temperature of high-purity quartz tubes should be ≤1100°C 7. During heating experiments, it is not recommended to close the exhaust valve and inlet valve at the flange end of the furnace tube. If it is necessary to heat the sample with the gas valves closed, the pressure gauge reading must be monitored at all times. If the pressure gauge reading exceeds 0.02MPa, the exhaust valve must be opened immediately to prevent accidents (such as furnace tube rupture or flange flying out).

Service Support

1-year warranty, lifetime support provided (warranty does not cover consumable parts such as furnace tubes and seals).