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CVD系统O1200-MINI-G3Z

Release time: 2024-07-10 03:41:12 Number of views: 126

高真空CVD系统__副本 (1)

Equipment Introduction:

Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.

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Equipment Introduction:

Chemical Vapor Deposition (CVD) refers to the method of synthesizing coatings or nanomaterials by reacting chemical gases or vapors on the surface of a substrate. It is a widely used technology in the semiconductor industry for depositing thin film materials, including a wide range of insulating materials, as well as most metal materials and metal alloy materials. For this purpose, we have developed a complete set of CVD coating systems suitable for material laboratories of universities, research institutes, environmental science, and other fields.

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Configuration details

 

NBD-101E embedded operating system with bilingual graphical interface, 7-inch true color touch screen input, intelligent human-machine dialogue mode, non-linear temperature correction.

Product Model

O1200-MINI-G3Z

Reach the temperature

≤1150℃

Heating zone size

200mm

Heating rate

≤20℃/min

Electrical specifications

AC220V  1.2KW

Gas system (optional)

Types of flow meters

Float flow meter

Mass flow meter

Piping diagram

  

Number of intake ports

2、3、4(Multiple options available)

Traffic range

20-250/20-800ml/min(Multiple ranges available)

50/100/200sccm(Multiple ranges available)

Working pressure difference range

0-0.15MPa

Low vacuum system (optional)

Vacuum pump model

NBD-1.5C

NBD-3C

NBD-4C

Pumping speed

1L/s

3L/s

4L/s

Inlet and outlet port dimensions

Φ8mmTower Coupling

Φ8mmTower Connector

KF16/25

Extreme pressure

1000Pa

100Pa

10Pa

Working temperature

5-40℃

Electrical specifications

AC220V

高真空系统(可选购)

真空泵型号

NBD-103(A)

NBD-103(B)

NBD-103(C)

抽气速率

110L/s

600L/s

700L/s

真空测量计

复合真空计

极限压力

10^-3Pa

10^-4Pa

10^-5Pa

工作温度

5-40℃

电气规格

AC 220V

AC 220V

AC 380V

* 支持非标定做,更多型号,欢迎来电垂询400-000-3746

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